• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a method for coating an article (1), wherein a coating (2) having one or more coating layers (3, 4, 5) is applied to the article (1), wherein at least one coating layer (5) consists essentially of Aluminum, titanium and nitrogen is formed, wherein the coating layer (5) at least partially adjacent lamellae of different chemical composition and is deposited from a gas phase with at least one aluminum precursor and at least one titanium precursor. According to the invention, by setting a molar ratio of aluminum to titanium, the lamellae of different chemical composition are each formed with cubic structure, while maintaining the cubic structure aluminum and titanium can be partially replaced by other metals and nitrogen partially replaced by oxygen and / or carbon. Furthermore, the invention relates to a correspondingly produced coating (2).
    公开号:AT516062A4
    申请号:T50025/2015
    申请日:2015-01-15
    公开日:2016-02-15
    发明作者:Reinhard Dr Pitonak；Arno Dr Köpf；Ronald Dr Weissenbacher
    申请人:Boehlerit Gmbh & Co Kg；
    IPC主号:
    专利说明:

    Process for coating an article and coating made therewith
    The invention relates to a method for coating an article, wherein a coating with one or more coating layers is applied to the article, wherein at least one coating layer is formed essentially of aluminum, titanium and nitrogen, wherein the coating layer at least partially adjacent lamellae of different chemical composition and is deposited from a gas phase with at least one aluminum precursor and at least one titanium precursor.
    Furthermore, the invention relates to a coating which is applied to an article by chemical vapor deposition (CVD), wherein the coating comprises one or more coating layers and wherein at least one coating layer is formed essentially of aluminum, titanium and nitrogen and at least in areas together having adjacent lamellae of different chemical composition.
    It is known from the prior art that cutting tools or cutting inserts are coated in the cutting insert with coating layers composed of titanium, aluminum and nitrogen to increase their service life. In general, this is often referred to as TiAIN coating layers, wherein an average chemical composition, regardless of whether one or more phases are present in the coating layer, is indicated by Τη_χΑΙχΝ. For coating layers containing more aluminum than titanium, the nomenclature AITiN or more precisely AlxTi-i_xN is also common.
    It is known from WO 03/085152 A2 to produce monophasic coating layers with a cubic structure in the system AITiN, with a cubic structure of the AITiN being obtained with a relative proportion of aluminum nitride (AIN) of up to 67 mol% (mol%). At higher AIN contents of up to 75 mol%, a mixture of cubic AITiN and hexagonal AIN and at an AIN content of more than 75 mol% exclusively hexagonal AIN and cubic titanium nitride (TiN) is formed. According to the cited document, the AITiN coating layers described by means of
    Physical Vapor Deposition (PVD) deposited. With a PVD process, maximum relative proportions of AIN are practically limited to 67 mol%, since otherwise it would be possible to overturn in phases containing aluminum only in the form of hexagonal AlN. However, a higher relative amount of cubic AlN is desirable in the art to maximize wear resistance as much as possible.
    It is also known from the prior art to use chemical vapor deposition (CVD) instead of PVD processes, wherein a CVD process is to be carried out at relatively low temperatures in the temperature window of 700 ° C. to 900 ° C., since cubic AITiN coating layers at temperatures of z. B. > 1000 ° C can not be produced due to the metastable structure of such coating layers. If appropriate, the temperatures according to US Pat. No. 6,238,739 B1 can also be lower, specifically in the temperature window from 550.degree. C. to 650.degree. C., although high chlorine contents in the coating layer must be accepted, which proves to be disadvantageous for an application. Attempts have therefore been made to optimize CVD processes in such a way that these coating layers can be produced using these AITiN coating layers with a high proportion of aluminum and cubic structure (I. Endler et al., Proceedings Euro PM 2006, Ghent, Belgium, 23. until October 25, 2006, Vol. 1.219). Although these coating layers have a high microhardness and thus fundamentally favorable properties for high wear resistance in use, it has been found that an adhesive strength of such coating layers can be too low. In this regard, it has therefore been proposed in DE 10 2007 000 512 B3 to provide below a cubic AITiN coating layer which is 3 pm thick, a 1 pm thick coating layer which is formed as a phase gradient layer and a phase mixture of hexagonal AIN, TiN and cubic AITiN wherein a cubic AITiN content with outward or to the (exclusively) cubic AITiN coating layer has an increasing proportion. Correspondingly coated inserts have been used to mill steel, however, only slight improvements in wear resistance have been achieved over coating layers made by a PVD process.
    In addition to the only slight improvement in wear resistance, another disadvantage of a bonding layer according to DE 10 2007 000 512 B3 is that the
    Bonding or phase gradient layer grows extremely fast, even in experiments on a laboratory scale (I. Endler et al., Proceedings Euro PM 2006, Ghent, Belgium, 23 to 25 October 2006, Vol 1.219). This results in production in a larger reactor, which is designed for large-scale coating of inserts, that the bonding or phase gradient layer in the proposed coating process is extremely thick, since a temperature for forming the ultimate intended cubic AITiN coating layer is lower , which requires appropriate time. During this lowering of a process temperature, however, a thickness of the bonding or phase gradient layer increases rapidly, because rapid cooling is not possible in a large-scale reactor. It would be conceivable to interrupt the coating process for a longer time or cooling, which is not economical.
    From WO 2013/134796 A1 a coated body and a method for coating a body have become known, wherein a special coating layer of AlxTi-i_xN is formed in individual areas with a lamellar structure. This lamellar structure is composed of alternating lamellae of Ti-i_xAlxN (predominantly Ti as metal) and, alternately, AlxTii_xN (predominantly Al as metal). The Ti-i_xAlxN exists as a cubic phase, whereas the AlxTi-i_xN has a hexagonal structure. Although in itself hexagonal AIN or AlxTi-i_xN according to the above is not desirable, in this particular structure, the hexagonal AIN or AlxTi-i_xN in the alternate formation with cubic TiN or Ti-i_xAlxN has been found to be advantageous the formation of the fins in the nanometer range is returned.
    Although an AlxTi-i_xN coating layer according to WO 2013/134796 A1 already has excellent properties, it would be desirable to be able to provide even better coating layers in terms of hardness. This is where the object of the invention is based and sets itself the goal of specifying a method of the type mentioned above, with which coatings can be produced with a corresponding coating layer.
    Another object of the invention is to provide a coating of the type mentioned, which has an AlxTi-i_xN coating layer with a high hardness.
    The procedural goal is achieved if in a method of the type mentioned by setting a molar ratio of aluminum to titanium, the lamellae of different chemical composition are each formed with a cubic structure, while maintaining the crystal system, aluminum and titanium partly by other metals and nitrogen partially can be replaced by oxygen and / or carbon.
    An advantage achieved by a method according to the invention can be seen in the fact that by setting a molar ratio of aluminum to titanium via appropriate supply of at least one aluminum precursor and at least one titanium precursor, the crystal systems in the slats targeted in the direction of a cubic structure or Phase can be adjusted. If the titanium content is kept relatively high in comparison with the prior art, lamellae are formed, which alternately have cubic Τί ^ χΑΙχΝ and cubic ΑΙχΤη_χΝ. In one of the alternating lamellae one composition is approximately TiN, in the other approximately AIN. If the formation of the two lamellae is cubic, the proportionately higher supply of a titanium precursor will lead to the cubic Ti ^ xAlxN lamellae impose on the adjacent AlxTii_xN lamellae the cubic structure, although in itself a hexagonal phase would be expected.
    It is advantageous that a respective cubic structure of the alternating lamellae results in an excellent hardness of a corresponding coating layer. In addition, however, it has also been shown that, despite an aluminum content lowered in comparison with the prior art, excellent oxidation resistance is ensured. By itself, a lower oxidation resistance would be expected for a lowered aluminum content, which, however, could not be observed in lamellar systems with cubic lamellae of different chemical composition. Apparently the set sequence of lamellas not only leads to higher hardness due to the higher titanium content, but also results in a high oxidation resistance.
    As long as the crystal system is preserved, aluminum and titanium may be partially replaced by other metals. Silicon is particularly suitable for this purpose. The contents of the replacing metals, such as silicon, may for example be limited to 20%, preferably 10%, in particular 7.5%, so as not to disturb the original formation of the lamellae too much. On the other hand, the use of substituting metals such as chromium in small proportions makes it possible to tailor the properties of the coating layer specifically with regard to application requirements.
    Likewise, it is possible for nitrogen to be partially replaced by oxygen and / or carbon, again provided that the crystal system is maintained. For example, a slight replacement of nitrogen with oxygen may be beneficial for certain machining applications. Again, it is necessary that the cubic crystal system set in the slats be maintained by the partial replacement of nitrogen with oxygen and / or carbon, thereby providing upper thresholds for possible replacement of the nitrogen.
    In particular for the formation of lamellae with cubic structure at least in individual regions of a coating layer, it is expedient that, during the deposition of the at least one coating layer of essentially aluminum, titanium and nitrogen, a molar Al / Ti ratio in the gas phase at least temporarily to a maximum of 3, 0, preferably at most 2.0, in particular at most 1.5, is limited. A higher molar ratio of titanium promotes the formation of cubic Tii_xAlxN lamellae (higher Ti content than Al content) that interact with ALTi-iJM lamellae (higher in Al than Ti content), with the first The type of lamellae is cubic and the second type of lamellae imposes this cubic structure or the crystal system.
    The lamellae can also be varied in thickness by setting a molar ratio of aluminum to titanium. It is preferred that the lamellae are deposited with a lamellar periodicity of less than 20 nm, preferably 3 nm to 17 nm, in particular 5 nm to 15 nm. In particular in the range from about 8 nm to 13 nm, excellent coating layers with lamellae are produced, which are exclusively cubic at least in areas of the coating layer.
    It is preferred that the at least one coating layer of essentially aluminum, titanium and nitrogen with an average composition AlxTi-i_xN and from a gas phase containing aluminum trichloride, titanium tetrachloride and ammonia is deposited. It is understood that in addition carrier gases such as nitrogen and / or
    Hydrogen can be used. Although in principle it is possible to work with one precursor each for aluminum and one precursor for titanium, it goes without saying that, if required, it is also possible to use a plurality of precursors for the individual metals. It is also possible to add further precursors, especially if aluminum and / or titanium are to be slightly substituted by other metals in order to finely adjust the properties of the coating layer. For example, chromium compounds and / or silicon compounds can be added to the reaction gas in order to incorporate chromium or silicon into the coating layer. For example, up to 5% chromium and / or 5% silicon may be provided to replace aluminum and / or titanium.
    It is also preferable that the at least one coating layer of substantially aluminum, titanium and nitrogen having an average composition AlxTi-i_xN having 0.70 < x < 0.90, preferably 0.75 < x < 0.85, is deposited. In comparison with the prior art, according to which the aim in the production of cubic structures of the general formula AlxTi-i_xN with aluminum contents as high as possible in order to maximize oxidation resistance, according to the invention deliberately provides a slightly lower relative content of aluminum in the coating layer be without an oxidation resistance would be adversely reduced.
    The at least one coating layer of essentially aluminum, titanium and nitrogen is deposited in a CVD method, wherein a pressure of 10 mbar to 80 mbar, in particular 20 mbar to 50 mbar, can be set. The adjustment of the pressure takes place by appropriate supply of the reaction gases or precursors together with carrier gases.
    In deposition in a CVD process, a temperature control is selected so that the at least one coating layer of substantially aluminum, titanium and nitrogen is deposited at a temperature of about 750 ° C to 850 ° C. In this temperature window, the desired configuration of the lamellae with cubic structure can be readily adjusted by varying the molar proportions of aluminum and titanium in the reaction gas.
    The at least one coating layer consisting essentially of aluminum, titanium and nitrogen is generally deposited with a thickness of from 1 μm to 20 μm, in particular from 3 μm to 8 μm.
    If the at least one coating layer of essentially aluminum, titanium and nitrogen is deposited on a suitable substrate such as sapphire, an epitaxial deposition can take place.
    Although any articles may be coated by a method of the present invention, it is preferably used in coating an article of a cemented carbide, particularly a cutting insert such as an indexable insert.
    In a method according to the invention, a coating layer of essentially aluminum, titanium and nitrogen may be the only coating layer applied to an object. However, in particular when coating cutting inserts such as inserts or knives, it is expedient to deposit a multilayer coating. In this case, a bonding layer of TiN, preferably having a thickness of less than 1.0 μm, can be deposited as the first coating layer. It may be favorable that the at least one coating layer of essentially aluminum, titanium and nitrogen is deposited on a coating layer of TiCN. The coating layer of TiCN is preferably a medium temperature TiCN (MT-TiCN) coating layer, as known in the art. Such a TiCN coating layer has a stalk-like structure extending perpendicularly from the surface of the substrate. On such a coating layer can be a coating layer of substantially aluminum, titanium and nitrogen with lamellae of different chemical composition, but each cubic structure excellent and with high adhesive strength, which is optimal for applications.
    A method according to the invention can be carried out particularly efficiently if a deposition temperature is lowered or held during the deposition of a first coating layer and subsequent deposition of each further coating layer. As a result, a substrate or object on which a coating is produced can first be brought to a specific desired temperature, after which the deposition of the coating with several coating layers is started. Since after the deposition of the first coating layer no more heating is required, the application of a coating with multiple coating layers can be done relatively quickly and thus in an economical manner. In particular, if a bonding layer of TiN, subsequently an MT-TiCN coating layer and finally a coating layer of substantially aluminum, titanium and nitrogen with lamellar structure provided within this coating layer, all coating layers in the temperature window of 750 ° C to 900 ° C can be deposited , Since the temperature window for the deposition of all coating layers is already relatively narrow and thus only a short time for the cooling to create the next coating layer must be waited or possibly even worked at the same temperature, results in an extremely rapid production of a coating with multiple coating layers ,
    The at least one coating layer of essentially aluminum, titanium and nitrogen is deposited by means of a CVD method. If further coating layers are provided, these are expediently likewise deposited by means of a CVD method.
    The further object of the invention is achieved by a coating of the aforementioned type, wherein the lamellae of different chemical composition are each formed with a cubic structure, while replacing the cubic structure of aluminum and titanium partially replaced by other metals and nitrogen by oxygen and / or carbon could be.
    A coating according to the invention is characterized in particular by the fact that these give excellent properties due to the formation with lamellae of different chemical composition, but the same crystal system within the different lamellae, which in turn are part of a coating layer. In particular, when forming the slats with each cubic
    Structure results for the coating layer with the lamellae a high hardness with simultaneous oxidation resistance.
    The lamellae are preferably formed with the lamellar periodicity of less than 20 nm, preferably 3 nm to 17 nm, in particular 5 nm to 15 nm. A lamellar periodicity can be adjusted in the production by changing the supplied contents of a titanium precursor at a fixed content of an aluminum precursor. In particular, the range of 5 nm to 15 nm for the lamellar periodicity, preferably about 8 nm to 13 nm, has proven to be particularly favorable for a high hardness. As a lamellar periodicity, a thickness of the sequence of two lamellae of different chemical composition is seen, as they are visible in a transmission electron microscope.
    The at least one substantially aluminum, titanium and nitrogen coating layer may be coated with an average AlxTii_xN composition of 0.70 < x < 0.90, preferably 0.75 < x < 0.85, to obtain an optimum of high hardness with high oxidation resistance.
    The at least one coating layer of essentially aluminum, titanium and nitrogen can have a thickness of from 1 μm to 20 μm, in particular from 3 μm to 8 μm.
    When a suitable substrate such as sapphire is provided, epitaxial growth is possible in the at least one substantially aluminum, titanium and nitrogen coating layer.
    To tune a coating profile for various cutting applications, it may be appropriate that the coating is constructed in multiple layers. If the cutting insert is a cemented carbide, but also in other cases, a bonding layer may be expedient as the first coating layer. For hard metals, it has proved to be advantageous in this regard to provide a first coating layer of preferably TiN with a thickness of less than 1.0 μm. Several further coating layers can then be deposited on this first coating layer or bonding layer. For the coating layer of essentially aluminum, titanium and nitrogen, it has proven to be expedient for this to be deposited on a coating layer of TiCN, usually MT-TiCN. It is possible that the coating layer of TiCN is deposited directly on the coating layer of TiN. But it is also possible that between several more coating layers are deposited. It is also possible that a plurality of coating layers of essentially aluminum, titanium and nitrogen are deposited in interplay with other coating layers and / or an outer coating layer is provided, for example made of TiN, Al 2 O 3 or diamond.
    According to the advantages shown, a cutting tool such as an insert can have a coating according to the invention.
    Further features, advantages and effects of the invention will become apparent from the embodiments illustrated below. In the drawings, to which reference is made, show:
    Fig. 1 shows a basic structure of a coating on an object;
    FIG. 2 shows a photograph with a transmission electron microscope (TEM); FIG.
    FIG. 3 is a diffraction diagram for recording according to FIG. 2; FIG.
    4 shows an X-ray diffractogram;
    Fig. 5 is a graph of hardness and modulus of elasticity;
    Fig. 6 is a TEM photograph;
    Fig. 7 is an illustration of Polfiguren.
    In Fig. 1, an inventive article 1 is shown schematically. The article 1 is usually formed from a sintered cemented carbide composed of carbides and / or carbonitrides of tungsten, titanium, niobium or other metals and a binder metal selected from the group cobalt, nickel and / or iron. A binding metal content is usually up to 10 wt .-%. Typically, the article 1 consists of up to 10% by weight of cobalt and / or other binder metals, with the remainder tungsten carbide and up to 5% by weight of further carbides and / or carbonitrides of other metals.
    On the article 1 serving as a bonding layer coating layer 3 is deposited from TiN. The coating layer 3 generally has a thickness of less than 2 μm, preferably 0.4 to 1.2 μm. On the coating layer 3, a coating layer 4 of TiCN serving as an intermediate layer is deposited. This coating layer 4 is an MT-TiCN coating layer. Such a coating layer 4 generally has a columnar structure with columnar crystals, which are aligned substantially parallel to the surface normal to the object 1. On the coating layer 4, finally, a further coating layer 5 is deposited. The coating layer 5 is formed essentially of aluminum, titanium and nitrogen and deposited by a CVD method. Depending on the method used or the gases used, smaller amounts of chlorine and oxygen may also be present in the coating layer 5. The remaining coating layers 3, 4 may be deposited by a CVD method.
    The article 1 may in particular be a cutting insert such as an indexable insert. For coating the same or for producing a coating 2, in a first step, the bonding layer or coating layer 3 of TiN is deposited at a process temperature of 880 ° C. to 900 ° C. from a gas containing or consisting of nitrogen, hydrogen and titanium tetrachloride. Subsequently, the temperature is lowered and at a temperature of z. B. 820 ° C to 840 ° C deposited from MT-TiCN coating layer 4 with a thickness of 2 pm to 5 pm deposited. The deposition takes place from a gas consisting of nitrogen, hydrogen, acetonitrile and titanium tetrachloride. The corresponding process temperature and the use of acetonitrile as carbon or nitrogen source ensures formation of the interlayer with columnar growth or stem-like crystals of TiCN. In this case, the TiCN coating layer has longitudinally extended crystals which preferably extend parallel, but at least predominantly at an angle of ± 30 ° to a surface normal of the article 1. With a corresponding TiCN coating layer, a good bonding of the subsequently deposited coating layer 5 with an average composition AlxTi-i_xN results. In this regard, it is desirable that the TiCN coating layer has an average composition TiCgN-i-amit a in the range of 0.3 to 0.8, especially 0.4 to 0.6.
    Finally, on the intermediate layer of TiCN, where titanium may be replaced by up to 40 mol% of aluminum to increase hardness, the coating layer 5 is applied with aluminum, titanium and nitrogen, for which the temperature is about 800 ° C to 830 ° C is lowered. The coating layer 5, which is but need not be an outermost coating layer, is made up of a gas containing aluminum trichloride, nitrogen, hydrogen, titanium tetrachloride, and a separately supplied mixture of ammonia and nitrogen. Thus, in a second step for the production of the intermediate layer and in a third step for the production of the coating layer 5, a respective process temperature can be lowered, which is extremely economical and permits a rapid preparation of the coating 2 on the cutting insert. The coating layer 5 is preferably deposited at a pressure of 20 mbar to 80 mbar, in particular 25 mbar to 55 mbar, wherein the pressure is controlled by the volume flow of the supplied gases.
    Tables 1 and 2 below show typical process parameters and compositions.
    Table 1 - Process parameters Coating with AITiN CVD coating layer with alternating cubic lamellae
    Table 2 - Properties of the AITiN coating layer
    FIG. 2 shows a TEM image of a coating structure in which a gradient layer AITiN has been applied to a cemented carbide, which has been applied in principle as described above, although the content of the titanium precursor is steadily increased and that of the aluminum precursor constant was held. The gradient layer starts with AI90Ti10N and ends with AI7oTi3oN. In the area between, the structure known from WO 2013/134796 A1 initially forms at even lower levels of the titanium precursor with alternating lamellae of hexagonal and cubic structure. At higher levels then forms a structure in which there are only more cubic phases, which is apparent from Fig. 3. Thus, by varying a ratio of the precursors, the structure can be selectively adjusted in the nanometer range. The lamella periodicity is approx. 9 nm.
    FIG. 4 shows an X-ray diffractogram of a coating layer 5 from which, upon evaluation, it can be seen that a coating layer 5 with a cubic structure is formed and hexagonal phases can not be detected, which confirms the results from FIG. 3 for the gradient layer.
    A coating layer 5 surprisingly not only has a high hardness, but also a good toughness. As the measurement results shown in FIG. 5 for the gradient layer according to FIG. 2 show, the gradient layer in the region of the exclusively cubic design has a maximum both in terms of hardness and toughness.
    FIG. 6 shows a high-resolution TEM image of a coating layer 5, which was produced as described above. In this photograph, the formed lamellae are visible, which have a Lamellenperiodizität of a few nanometers. Lamellae with a composition ΑΙχΤη_χΝ with a higher Al content than Ti and a cubic structure alternate with lamellae Ti-i-jALN lamellae with a higher Ti content than Al content and also cubic structure alternately. It is believed that this particular nanostructure causes the excellent properties of the coating layer 5, in particular the high hardness and toughness. The coating layer 5 is not only particularly resistant to oxidation and formed with high hardness and toughness, but also very temperature resistant. Thermal continuous loads at 950 ° C to 1050 ° C for one hour showed that in carbide substrates from 1000 ° C cracks occur, whereas a coating layer 5 apart from the simultaneous demolition with carbide parts of the thermal load withstands.
    If a coating layer 5 is deposited on a suitable substrate such as sapphire, an epitaxial growth can also take place, which can be deduced from the pole figures in FIG. 7, which relate to a coating layer 5 deposited directly on sapphire.
    Although a coating layer 5, optionally together with other coating layers 3, 4, preferably for cutting inserts such as indexable inserts application, of course, any other tools can be coated, which are exposed to high temperatures and mechanical stresses in use and also have to have a high oxidation resistance.
    权利要求:
    Claims (23)
    [1]
    1. A method for coating an article (1), wherein on the article (1) a coating (2) with one or more coating layers (3, 4, 5) is applied, wherein at least one coating layer (5) consists essentially of aluminum , Titan and nitrogen is formed, wherein the coating layer (5) at least partially adjacent lamellae of different chemical composition and is deposited from a gas phase with at least one aluminum precursor and at least one titanium precursor, characterized in that by adjusting a molar ratio from aluminum to titanium, the lamellae of different chemical composition are each formed with a cubic structure, while retaining the cubic structure aluminum and titanium can be partially replaced by other metals and nitrogen partially replaced by oxygen and / or carbon.
    [2]
    2. The method according to claim 1, characterized in that in the deposition of the at least one coating layer (5) of substantially aluminum, titanium and nitrogen, a molar Al / Ti ratio in the gas phase at least temporarily to a maximum of 3.0, preferably a maximum of 2 , 0, in particular a maximum of 1.5, is limited.
    [3]
    3. The method according to claim 1 or 2, characterized in that the lamellae with a lamellar periodicity of less than 20 nm, preferably 3 nm to 17 nm, in particular 5 nm to 15 nm, are deposited.
    [4]
    4. The method according to any one of claims 1 to 3, characterized in that the at least one coating layer (5) of substantially aluminum, titanium and nitrogen having an average composition AlxTh_xN and from a gas phase containing aluminum trichloride, titanium tetrachloride and ammonia is deposited.
    [5]
    A method according to claim 4, characterized in that the at least one coating layer (5) is made of substantially aluminum, titanium and nitrogen having an average composition AlxTh_xN of 0.70 < x < 0.90, preferably 0.75 < x < 0.85, is deposited.
    [6]
    6. The method according to any one of claims 1 to 5, characterized in that the at least one coating layer (5) of substantially aluminum, titanium and nitrogen at a pressure of 10 mbar to 80 mbar, in particular 20 mbar to 50 mbar, is deposited.
    [7]
    7. The method according to any one of claims 1 to 6, characterized in that the at least one coating layer (5) of substantially aluminum, titanium and nitrogen at a temperature of about 750 ° C to 850 ° C is deposited.
    [8]
    8. The method according to any one of claims 1 to 7, characterized in that at least one coating layer (5) of substantially aluminum, titanium and nitrogen having a thickness of 1 pm to 20 pm, in particular 3 pm to 8 pm, is deposited.
    [9]
    9. The method according to any one of claims 1 to 8, characterized in that the at least one coating layer (5) is epitaxially deposited from substantially aluminum, titanium and nitrogen.
    [10]
    10. The method according to any one of claims 1 to 9, characterized in that an article (1) is coated from a hard metal, in particular a cutting insert such as an indexable insert.
    [11]
    11. The method according to any one of claims 1 to 10, characterized in that on the article (1) a multilayer coating (2) is deposited, wherein as the first coating layer (3) a bonding layer of TiN, preferably with a thickness of less than 1 , 0 pm, is deposited.
    [12]
    12. The method according to any one of claims 1 to 11, characterized in that the at least one coating layer (5) of substantially aluminum, titanium and nitrogen on a coating layer (4) of TiCN is deposited.
    [13]
    13. The method according to claim 11 or 12, characterized in that in the deposition of a first coating layer (3) and subsequent deposition of each further coating layer (4, 5) a deposition temperature is lowered or held respectively.
    [14]
    14. The method according to any one of claims 1 to 13, characterized in that the at least one coating layer (5) of substantially aluminum, titanium and nitrogen, preferably all coating layers (3, 4, 5), are deposited by means of a CVD method.
    [15]
    A coating (2) applied to an article (1) by a CVD process, the coating (2) comprising one or more coating layers (3, 4, 5), and wherein at least one coating layer (5) substantially is formed of aluminum, titanium and nitrogen and at least in areas adjacent lamellae of different chemical composition, characterized in that the lamellae of different chemical composition are each formed with a cubic structure, while maintaining the cubic structure of aluminum and titanium partially by other metals and Nitrogen can be replaced by oxygen and / or carbon.
    [16]
    16. Coating (2) according to claim 15, characterized in that the lamellae with a lamellar periodicity of less than 20 nm, preferably 3 nm to 17 nm, in particular 5 nm to 15 nm, are formed.
    [17]
    A coating (2) according to claim 15 or 16, characterized in that the at least one coating layer (5) is made of substantially aluminum, titanium and nitrogen of average composition Alx Ti-i_x N with 0.70 < x < 0.90, preferably 0.75 < x < 0.85.
    [18]
    18. Coating (2) according to one of claims 15 to 17, characterized in that the at least one coating layer (5) of substantially aluminum, titanium and nitrogen has a thickness of 1 pm to 20 pm, in particular 3 pm to 8 pm ,
    [19]
    19. Coating (2) according to one of claims 15 to 18, characterized in that the at least one coating layer (5) is grown epitaxially from essentially aluminum, titanium and nitrogen.
    [20]
    20. Coating (2) according to one of claims 15 to 19, characterized in that the coating (2) is constructed in multiple layers.
    [21]
    21, coating (2) according to claim 20, characterized in that a first coating layer (3) is provided as a bonding layer to the article (1), wherein the first coating layer (3) preferably of TiN having a thickness of less than 1.0 pm is formed.
    [22]
    22, coating (2) according to claim 20 or 21, characterized in that the at least one coating layer (5) of substantially aluminum, titanium and nitrogen on a coating layer (4) of TiCN is deposited.
    [23]
    23. article (1), in particular cutting tool such as an insert, with a coating (2) according to any one of claims 15 to 22nd
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    AT510421B1|2012-04-15|DIAMOND-COATED HARD-METAL BODY AND METHOD FOR THE PRODUCTION THEREOF
    DE60037401T2|2008-11-27|Coated cemented carbide cutting tool and method of making the same
    同族专利:
    公开号 | 公开日
    AT516062B1|2016-02-15|
    US10597776B2|2020-03-24|
    CN107109640B|2019-11-01|
    US20180023194A1|2018-01-25|
    MX2017005895A|2017-11-08|
    CN107109640A|2017-08-29|
    WO2016112417A1|2016-07-21|
    BR112017002732A2|2017-12-19|
    JP2018504515A|2018-02-15|
    EP3245314A1|2017-11-22|
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    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    ATA50025/2015A|AT516062B1|2015-01-15|2015-01-15|Process for coating an article and coating made therewith|ATA50025/2015A| AT516062B1|2015-01-15|2015-01-15|Process for coating an article and coating made therewith|
    US15/543,781| US10597776B2|2015-01-15|2015-11-03|Process for coating an article and coating produced thereby|
    BR112017002732A| BR112017002732A2|2015-01-15|2015-11-03|process for coating an object and coating prepared by it|
    CN201580073689.3A| CN107109640B|2015-01-15|2015-11-03|The method of object is covered and thus the lid that produces covers object for covering|
    PCT/AT2015/050277| WO2016112417A1|2015-01-15|2015-11-03|Process for coating an article and coating produced thereby|
    EP15798310.7A| EP3245314A1|2015-01-15|2015-11-03|Process for coating an article and coating produced thereby|
    JP2017506997A| JP2018504515A|2015-01-15|2015-11-03|Method for coating an object and the coating produced thereby|
    MX2017005895A| MX2017005895A|2015-01-15|2015-11-03|Process for coating an article and coating produced thereby.|
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